CSU helps develop extreme microscope
Rocky Mountain News
Published July 24, 2006 at midnight
Engineers at Colorado State University have been credited with helping to create the world’s highest spatial resolution extreme ultraviolet tabletop microscope.
Working with the University of California, Berkeley, and Lawrence Berkeley National Laboratory, the team created a microscope that can see objects more than 1,000 times smaller than the diameter of a human hair.
Semiconductor manufacturers will be able to use the microscope to test for flaws in the equipment used to print microchips. This type of experiment currently is only possible at large factories.
A CSU press release states the technology involves the manipulation of short wavelength light in the extreme ultraviolet or soft X-ray range of the electromagnetic spectrum with wavelengths 10 to 50 times shorter than visible light.
The tabletop microscope, using extreme ultraviolet lasers, can view samples as small as a billionth of a meter.
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